Transmission Electron Microscope
Overview
The Transmission Electron Microscope (TEM) provides atomic-resolution imaging and analytical capabilities for nanoscale characterization of materials, biological specimens, and nanostructures. By transmitting a focused electron beam through ultra-thin specimens, the TEM reveals crystal structure, defects, interfaces, and compositional variations at sub-angstrom resolution.
Equipped with STEM (scanning TEM) capability, energy-dispersive X-ray spectroscopy (EDS), and electron energy loss spectroscopy (EELS), this system is the definitive tool for advanced materials research, semiconductor failure analysis, and life science ultrastructural studies.
Key Features
- Point resolution better than 0.2 nm for atomic imaging
- STEM with high-angle annular dark-field (HAADF) detector
- Integrated EDS for elemental mapping
- EELS for electronic structure and bonding analysis
- Selected area electron diffraction (SAED) capability
- Automated alignment and stigmation correction
- Cryo-TEM option for biological specimen imaging
Specifications
| Parameter | Value |
|---|---|
| Accelerating Voltage | 80 – 200 kV (selectable) |
| Point Resolution | < 0.2 nm |
| STEM Resolution | < 0.14 nm (HAADF) |
| Magnification | 50× – 1,500,000× |
| EDS Detector | Silicon drift, > 100 mm² |
| Camera | 4k × 4k CMOS (16-bit) |
| Specimen Holders | Single-tilt, double-tilt, cryo, tomography |
| Column Vacuum | < 2 × 10⁻⁵ Pa |
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